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Nanoplus
德國Nanoplus www.nanoplus.com
Nanoplus GmbH 公司于1998年自Würzburg 大學(xué)技術(shù)物理系脫離而創(chuàng)建。其主要活動(dòng)是將研究結(jié)果應(yīng)用于實(shí)際程序與產(chǎn)品內(nèi),其專門從事光電子學(xué)儀器與客戶指定的微-毫微結(jié)構(gòu)塑造。目前在nanoplus內(nèi)有15名員工。該公司裝備有一條完整的處理線用于半導(dǎo)體激光制造,其包括不同的干式蝕刻系統(tǒng)、噴濺系統(tǒng)、脫水器、掩模對準(zhǔn)器、激光裝備工具等等,均處于250 m2 的絕對無塵室設(shè)備中(級別100-10000)。該公司還具有12 m2 的實(shí)驗(yàn)室空間以用于技術(shù)支持(高純度氣體與水的制備)。
Nanoplus的主產(chǎn)品是與返回激光偶合的復(fù)合體,它是通過nanoplus自己的獨(dú)特技術(shù)制造的。通過此項(xiàng)技術(shù)實(shí)現(xiàn)的DFB激光具有高單獨(dú)模式產(chǎn)出,高效率,以及高側(cè)模式抑制率(>40dB),其與低背射敏感度與端口接合。近些年所開發(fā)的該技術(shù)不要求過度生長,即可應(yīng)用與各種半導(dǎo)體,包括基于GaSb、InP與GaAs 的材料?;谶@些材料系統(tǒng),nanoplus制造波長范圍為0.7到2.5μm的DFB與Fabry-Perot 激光二極管,應(yīng)用于傳感技術(shù)與分光鏡技術(shù)。
此外,nanoplus制造波長范圍為5到12μm 的量子級串聯(lián)激光。
Nanoplus was founded in 1998 as a spin-off from the department of Technical Physics at Würzburg University to transfer research results into applications and products with a specialization in optoelectronics devices and customer specific micro- and nano-structuring.
The company is equipped with a complete process line for semiconductor laser fabrication, comprising different dry etch systems, sputter systems, evaporators, mask aligners, laser mounting facilities, etc. in a 250 m2 clean room (class 100-10000). Nanoplus facilities also comprise 120 m2 of laboratory space for technical supply (a/c, high purity gases, water preparation) and 500 m2 of office and characterization space.
A key product of nanoplus are distributed feedback (DFB) laser diodes based on a unique and patented technology. DFB lasers realized by this technique have a high single mode yield, high efficiencies as well as high sidemode supression ratio (SMSR) around 40dB combined with low back reflection sensitivity and thresholds. The technology has been optimized for a wide variety of semiconductor heterostructures including GaSb, InP and GaAs based materials. Based on these material systems, nanoplus produces DFB and Fabry-Perot laser diodes in the wavelength range from 0.7 up to 2.8 µm for sensing and spectroscopy as well as telecom applications.